Method and system for optical inspection of an object
US7006224B2 · kind B2 · utility
10Cited by
3References
44Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 2, 2003 |
| Grant date | Feb 28, 2006 |
| Priority date | — |
| Expiry date | Feb 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for optical inspection of patterned and non-patterned objects. The methods include determining a state of polarization of light reflected from the object, establishing a polarization state of the incident light, and filtering the reflected light by polarization so as to provide an optical signal that is detected by a detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.