High-resolution gas gauge proximity sensor
US7010958B2 · kind B2 · utility
10Cited by
19References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2002 |
| Grant date | Mar 14, 2006 |
| Priority date | — |
| Expiry date | Mar 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0186
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor, and/or snubber made of porous material, and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.