Method and apparatus for minimizing agglomerate particle size in a polishing fluid
US7014539B1 · kind B1 · utility
1Cited by
5References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 18, 2004 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Nov 18, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B21/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus and method for minimizing the size of agglomerated particles in a polishing fluid is provided. The method includes positioning a polishing pad between a sacrificial member and a support member such that the sacrificial member is in communication with the polishing pad, thereby causing the agglomerated particles to separate. The apparatus includes a polishing pad and a polishing fluid condition. The polishing fluid conditioner includes a sacrificial member and a support member, wherein the sacrificial member is in communication with the polishing pad so as to cause the agglomerated particles to separate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.