Electron holography method
US7015469B2 · kind B2 · utility
5Cited by
10References
5Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jan 9, 2004 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Jul 21, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An inline electron holograph method for observing a specimen with a transmission electron microscope having an electron gun, a collimating lens system, two spaced objective lenses, a biprism, and an imaging means comprises the steps of: with the first objective lens forming a virtual image of a portion of the specimen; with the second objective lens focussing the virtual image at an intermediate image plane to form an intermediate image; and projecting the intermediate image onto the imaging means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.