Signal improvement in eddy current sensing
US7016795B2 · kind B2 · utility
32Cited by
32References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 4, 2003 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Dec 15, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/90
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Improved endpoint detection and/or thickness measurements may be obtained by correcting sensor data using calibration parameters and/or drift compensation parameters. Calibration parameters may include an offset and a slope, or other parameters. Drift compensation parameters may include off-wafer measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.