Suspended gas distribution plate
US7017269B2 · kind B2 · utility
238Cited by
26References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2003 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Dec 5, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.