Protection of work piece during surface processing
US7018268B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2003 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Apr 8, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23B2226/18
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention provides an apparatus and method for protecting a work piece during surface processing. The apparatus employs a protective material to protect a wafer during backside grinding. The apparatus can further include a vacuum chuck that allows the passage of a vacuum signal, a frame holding the protective material, a frame holder to hold the frame, and a fastening arrangement to fasten the frame holder to the chuck adjacent a support surface. The method provided by the invention can include providing a vacuum chuck, placing a protective material in contact with the chuck, placing a wafer in contact with the protective material, applying a vacuum signal securing the wafer with the chuck, and grinding the backside surface of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.