Semiconductor substrate having pillars within a closed empty space
US7019364B1 · kind B1 · utility
37Cited by
2References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2000 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Aug 30, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12097
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
To change a plurality of trenches to one flat empty space by two-dimensionally forming the trenches on the surface of a semiconductor substrate and then applying heat treatment to the semiconductor substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.