Inventor · Yokohama, JP

Yoshitaka Tsunashima

79Patents
23h-index
70Co-inventors
91Inventor score

Filing activity: May 2, 1984 → Apr 27, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6087719A Chip for multi-chip semiconductor device and method of manufacturing the same Electricity 185 Expired
US6376888B1 Semiconductor device and method of manufacturing the same Electricity 83 Expired
US6335251B1 Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor Electricity 76 Expired
US6333547A Semiconductor device and method of manufacturing the same Electricity 68 Expired
US5888876A Deep trench filling method using silicon film deposition and silicon migration Electricity 58 Expired
US6346438B1 Method of manufacturing a semiconductor device Emerging Cross-Sectional Technologies 53 Expired
US6570217B1 Semiconductor device and method of manufacturing the same Electricity 46 Expired
US6278164A Semiconductor device with gate insulator formed of high dielectric film Electricity 46 Expired
US6617226B1 Semiconductor device and method for manufacturing the same Electricity 44 Expired
US5069244A Liquid source container device Emerging Cross-Sectional Technologies 40 Expired
US6784508B2 Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof Electricity 38 Expired
US7019364B1 Semiconductor substrate having pillars within a closed empty space Physics 37 Expired
US6100132A Method of deforming a trench by a thermal treatment Emerging Cross-Sectional Technologies 36 Expired
US6284583A Semiconductor device and method of manufacturing the same Electricity 34 Expired
US5970352A Field effect transistor having elevated source and drain regions and methods for manufacturing the same Electricity 34 Expired
US6232641A Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor Electricity 31 Expired
US5582640A Semiconductor device and its fabricating method Electricity 29 Expired
US7372113B2 Semiconductor device and method of manufacturing the same Electricity 29 Expired
US4575920A Method of manufacturing an insulated-gate field-effect transistor Electricity 28 Expired
US6326658A Semiconductor device including an interface layer containing chlorine Electricity 26 Expired
US7235456B2 Method of making empty space in silicon Physics 25 Expired
US5605574A Semiconductor wafer support apparatus and method Chemistry; Metallurgy 24 Expired
US6093243A Semiconductor device and its fabricating method Electricity 23 Expired
US6383837B1 Method of manufacturing a multi-chip semiconductor device effective to improve alignment Electricity 22 Expired
US6184083A Semiconductor device and method of manufacturing the same Emerging Cross-Sectional Technologies 21 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.