Apparatus and method for a scanning probe microscope

US7022985B2 · kind B2 · utility

Assignee

• JPK INSTRUMENTS AG · DE

Inventors

• Detlef Knebel · Berlin, DE
• Torsten Jähnke · Berlin, DE
• Olaf Sünwoldt · Berlin, DE

Key dates

• Filing date: Sep 24, 2002
• Grant date: Apr 4, 2006
• Expiry date: Sep 24, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/868
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical shifting unit to displace the probe in a direction perpendicular to the plane, and a specimen support to receive a specimen. A condenser light path is formed through the measuring assembly so that the specimen support is located in the area of an end of the condenser light path.