Multiple floating guard ring edge termination for silicon carbide devices

US7026650B2 · kind B2 · utility

Assignee

• Cree, Inc. · US

Inventors

• Sei-Hyung Ryu · Cary, US
• Anant Agarwal · San Jose, US

Key dates

• Filing date: Dec 9, 2003
• Grant date: Apr 11, 2006
• Expiry date: Jan 9, 2024

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D62/106

Abstract

Edge termination for silicon carbide devices has a plurality of concentric floating guard rings in a silicon carbide layer that are adjacent and spaced apart from a silicon carbide-based semiconductor junction. An insulating layer, such as an oxide, is provided on the floating guard rings and a silicon carbide surface charge compensation region is provided between the floating guard rings and is adjacent the insulating layer. Methods of fabricating such edge termination are also provided.