Engagement probe having a grouping of projecting apexes for engaging a conductive pad
US7026835B2 · kind B2 · utility
94Cited by
67References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2002 |
| Grant date | Apr 11, 2006 |
| Priority date | — |
| Expiry date | Aug 30, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49204
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An exemplary engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate is described. Constructions are disclosed for testing apparatus comprising an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.