Processing apparatus and information storage apparatus and method
US7031792B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2002 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Aug 20, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C29/006
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A processing apparatus comprises a process apparatus body equipped with a plurality of process sections for applying a predetermined processing to a target object and a transfer device for transferring the target object among the process sections, a first control section for controlling the entire process apparatus body including the transfer device, a second control section for controlling the plural process sections, an information storage section receiving the signal exchanged between the first control section and the second control section and storing a plurality of information including the information corresponding to the received signal, and an information storage selecting mechanism for selecting the storing frequency of the information to the information storage section in accordance with the kind of the information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.