Method and system for use in the monitoring of samples with a charged particle beam

US7034297B2 · kind B2 · utility

Assignee

• Applied Materials Israel Ltd. · IL

Inventors

• Igor Petrov · Holon, IL
• Zvika Rosenberg · Mevaseret Tsiyon, IL
• Pavel Adamec · Haar, DE
• Igor Krayvitz · Rehovot, IL

Key dates

• Filing date: Mar 5, 2003
• Grant date: Apr 25, 2006
• Expiry date: Jun 9, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/20207
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angle θ1 with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angle θ2 between the primary beam propagation axis and said optical axis.