Heat treatment apparatus
US7044731B2 · kind B2 · utility
1Cited by
4References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 20, 2002 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Jun 27, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/52
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Exhaust pressure in an exhaust system 15 that evacuates a processing furnace 2 is determined as absolute pressure by using a differential manometer 23, which measures the exhaust pressure as differential pressure, and a barometer, which measures atmospheric pressure as absolute pressure. An opening of a pressure regulating valve 25 is adjusted based on the absolute exhaust pressure thus determined so that pressure in the processing furnace 2 is regulated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.