Yukimasa Saito
18Patents
6h-index
36Co-inventors
66Inventor score
Filing activity: Dec 21, 1998 → Jan 26, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6383300B1 | Heat treatment apparatus and cleaning method of the same | Chemistry; Metallurgy | 373 | Expired |
| US8070302B2 | Laminate type light-emitting diode device, and reflection type light-emitting diode unit | Mechanical Engineering; Lighting; Heating | 65 | Active |
| US6159298A | Thermal processing system | Chemistry; Metallurgy | 41 | Expired |
| US6807971B2 | Heat treatment apparatus and cleaning method of the same | Chemistry; Metallurgy | 37 | Expired |
| US6171104A | Oxidation treatment method and apparatus | Chemistry; Metallurgy | 21 | Expired |
| US6805968B2 | Members for semiconductor manufacturing apparatus and method for producing the same | Chemistry; Metallurgy | 6 | Expired |
| US6736636B2 | Thermal processor with gas supply | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6936108B1 | Heat treatment device | Chemistry; Metallurgy | 3 | Expired |
| US10786837B2 | Method for cleaning chamber of substrate processing apparatus | Performing Operations; Transporting | 3 | Active |
| US8057046B2 | Projector device having assembly of reflection type light emitting diodes | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US7479619B2 | Thermal processing unit | Electricity | 2 | Active |
| US7044731B2 | Heat treatment apparatus | Chemistry; Metallurgy | 1 | Expired |
| US10882330B2 | Printer | Performing Operations; Transporting | 1 | Active |
| US7144823B2 | Thermal treatment apparatus | Electricity | 1 | Expired |
| US12172198B2 | Gas cluster processing device and gas cluster processing method | Electricity | 0 | Active |
| US10421218B2 | Roller-type depressing device, imprinting device, and roller-type depressing method | Performing Operations; Transporting | 0 | Active |
| US11267021B2 | Gas cluster processing device and gas cluster processing method | Electricity | 0 | Active |
| US11761075B2 | Substrate cleaning apparatus | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.