Catadioptric reductions lens
US7046459B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2004 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Jun 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B17/0892
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A catadioptric projection lens for imaging a pattern arranged in an object plane while creating a real intermediate image, having a catadioptric first lens section having a concave mirror and a beam-deflection device, as well as a dioptric second lens section that follows the catadioptric lens section, between its object plane and image plane. The beam-deflection device deflects radiation coming from the object plane to the concave mirror. Positive refractive power is arranged following the first reflective surface, between the latter and the concave mirror, within an optical near-field of the object plane, within which the height of the principal ray of the outermost field point of radiation coming from the object exceeds the marginal-ray height. The intermediate image is arranged prior to light which forms the intermediate image being reflected by a second reflective surface that is provided for the purpose of allowing arranging the object plane and image plane such that they will be parallel to one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.