System, method and apparatus for constant voltage control of RF generator for optimum operation
US7053000B2 · kind B2 · utility
2Cited by
31References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2003 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Sep 24, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B2201/71
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.