Robert Knop
6Patents
3h-index
9Co-inventors
42Inventor score
Filing activity: Oct 8, 1998 → May 21, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6333272A | Gas distribution apparatus for semiconductor processing | Emerging Cross-Sectional Technologies | 157 | Expired |
| US6361645B1 | Method and device for compensating wafer bias in a plasma processing chamber | Electricity | 51 | Expired |
| US6508913B2 | Gas distribution apparatus for semiconductor processing | Emerging Cross-Sectional Technologies | 35 | Expired |
| US7033845B2 | Phase control of megasonic RF generator for optimum operation | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7053000B2 | System, method and apparatus for constant voltage control of RF generator for optimum operation | Performing Operations; Transporting | 2 | Expired |
| US7780825B2 | Substrate gripper with integrated electrical contacts | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.