Method and apparatus for rapid sample preparation in a focused ion beam microscope
US7053383B2 · kind B2 · utility
5Cited by
7References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 22, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Aug 4, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting the TEM sample holder form from the coupon in a press. The cutting joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for inspection in a TEM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.