Method and system for detecting defects
US7053999B2 · kind B2 · utility
6Cited by
11References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2002 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Jan 31, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.