Patent · US Expired

Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system

US7060978B2 · kind B2 · utility

2Cited by

8References

20Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Volker Drexel · Oberkochen, DE
Johannes Bihr · Aalen, DE
Gerd Benner · Aalen, DE
Stephan Kujawa · Berlin, DE

Key dates

Filing date	Mar 14, 2001
Grant date	Jun 13, 2006
Priority date	—
Expiry date	Apr 30, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/244
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A detector system for a particle beam apparatus, in particular for a scanning electron microscope, has a target structure, which in a central region near the optical axis includes an electron-converting material. The target structure also includes either a non-converting material in a region remote from the optical axis or the region remote from the optical axis is offset in the direction of the optical axis with respect to the region near the optical axis that includes the electron-converting material. The detector system makes possible separate detection of only back-scattered electrons or only secondary electrons.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.