Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
US7060988B2 · kind B2 · utility
6Cited by
5References
23Claims
0Family size
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Key dates
| Filing date | Mar 17, 2005 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Mar 17, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus and methods for improving beam stability in high current gas-cluster ion beam systems by reducing the frequency of transients occurring in the vicinity of the ionizer through use of shielding conductors and distinct component electrical biasing to inhibit backward extraction of ions from the ionizer towards the gas-jet generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.