Michael E. Mack
18Patents
11h-index
20Co-inventors
72Inventor score
Filing activity: Sep 17, 1975 → Sep 28, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7060989B2 | Method and apparatus for improved processing with a gas-cluster ion beam | Electricity | 56 | Expired |
| US7377228B2 | System for and method of gas cluster ion beam processing | Electricity | 50 | Expired |
| US7173252B2 | Ionizer and method for gas-cluster ion-beam formation | Electricity | 49 | Expired |
| US4289397A | Laser ceilometer signal processing means | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6646277B2 | Charging control and dosimetry system for gas cluster ion beam | Electricity | 23 | Expired |
| US5757018A | Zero deflection magnetically-suppressed Faraday for ion implanters | Electricity | 21 | Expired |
| US5959305A | Method and apparatus for monitoring charge neutralization operation | Electricity | 15 | Expired |
| US6222196A | Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter | Electricity | 15 | Expired |
| US5629528A | Charged particle beam system having beam-defining slit formed by rotating cyclinders | Electricity | 14 | Expired |
| US6831272B2 | Gas cluster ion beam size diagnostics and workpiece processing | Electricity | 12 | Expired |
| US5031674A | Fluid flow control method and apparatus for minimizing particle contamination | Emerging Cross-Sectional Technologies | 12 | Expired |
| US4987933A | Fluid flow control method and apparatus for minimizing particle contamination | Emerging Cross-Sectional Technologies | 11 | Expired |
| US5240046A | Fluid flow control method and apparatus for minimizing particle contamination | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7696495B2 | Method and device for adjusting a beam property in a gas cluster ion beam system | Electricity | 8 | Active |
| US4074208A | Stabilized repetitively pulsed flashlamps | Electricity | 7 | Expired |
| US7060988B2 | Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system | Electricity | 6 | Expired |
| US4669085A | Electro-optical modulator for an electro-optically modulated laser | Electricity | 5 | Expired |
| US4170762A | Flow channel for fluid medium laser | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.