Method of manufacturing an optical element using a hologram

US7061626B1 · kind B1 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Frank Schillke · Aalen, DE
• Susanne Beder · Aalen, DE
• Jochen Hetzler · Aalen, DE

Key dates

• Filing date: May 14, 2004
• Grant date: Jun 13, 2006
• Expiry date: May 14, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03H2001/0072
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of manufacturing an optical element having an optical surface of a target shape includes performing an interferometric test using an interferometer optics, wherein the interferometer optics includes a hologram that deflects a beam of measuring light by a substantial angle or that displaces an axis of symmetry of measuring light emerging from the hologram with respect to an axis of symmetry of measuring light incident on the hologram.