Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light
US7067819B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 14, 2004 |
| Grant date | Jun 27, 2006 |
| Priority date | — |
| Expiry date | May 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system configured for measurement of a specimen is provided. The system includes an optical subsystem configured to perform measurements of the specimen. The optical subsystem includes a light source that is configured to generate light having a relatively large number of separated spectral peaks with substantially no continuous background. In some embodiments, the light may include vacuum ultraviolet light, extreme ultraviolet light, and/or soft x-rays. A carrier medium is also provided that includes program instructions executable on a computer system to analyze data generated by a detector of an optical subsystem by partitioning the data into individual peaks spaced apart across a wavelength spectrum. Partitioning the data preferably corrects for spectrum shift, drift, stretching, shrinking, or a combination thereof at the detector. The individual peaks correspond to separated spectral peaks in light generated by a light source of the optical subsystem.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.