Inventor · Palo Alto, CA, US

Gary Janik

50Patents
15h-index
49Co-inventors
84Inventor score

Filing activity: Jul 24, 1986 → Nov 30, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6816570B2 Multi-technique thin film analysis tool Physics 71 Expired
US7067819B2 Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light Physics 51 Expired
US7039158B1 Multi-technique thin film analysis tool Physics 46 Expired
US6999180B1 Optical film topography and thickness measurement Physics 46 Expired
US6771735B2 Method and apparatus for improved x-ray reflection measurement Physics 40 Expired
US5404217A Laser liquid flow cell manifold system and method for assembly Physics 38 Expired
US7369233B2 Optical system for measuring samples using short wavelength radiation Physics 38 Expired
US7006596B1 Light element measurement Electricity 37 Expired
US6711232B1 X-ray reflectivity measurement Physics 34 Expired
US7433056B1 Scatterometry metrology using inelastic scattering Physics 31 Active
US7359052B2 Systems and methods for measurement of a specimen with vacuum ultraviolet light Physics 27 Expired
US5475235A Control of laser light power output for use in light scattering instruments by inducing mode hopping and averaging result Electricity 25 Expired
US5530540A Light scattering measurement cell for very small volumes Physics 23 Expired
US4765736A Frequency modulation spectroscopy using dual frequency modulation and detection Physics 20 Expired
US6128080A Extended range interferometric refractometer Physics 17 Expired
US7072442B1 X-ray metrology using a transmissive x-ray optical element Physics 14 Expired
US7253901B2 Laser-based cleaning device for film analysis tool Physics 13 Expired
US6788760B1 Methods and apparatus for characterizing thin films Electricity 13 Expired
US7274440B1 Systems and methods for measuring stress in a specimen Electricity 11 Expired
US7075073B1 Angle resolved x-ray detection Physics 11 Expired
US7139365B1 X-ray reflectivity system with variable spot Physics 10 Expired
US5676830A Method and apparatus for reducing band broadening in chromatographic detectors Physics 10 Expired
US5900152A Apparatus to reduce inhomogeneities in optical flow cells Physics 10 Expired
US7166838B1 X-ray imaging for patterned film measurement Physics 8 Expired
US7564552B2 Systems and methods for measurement of a specimen with vacuum ultraviolet light Physics 7 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.