X-ray metrology using a transmissive x-ray optical element
US7072442B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 20, 2002 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | May 3, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An x-ray metrology system includes one or more transmissive x-ray optical elements, such as zone plates or compound refractive x-ray lenses, to shape the x-ray beams used in the measurement operations. Each transmissive x-ray optical element can focus or collimate a source x-ray beam onto a test sample. Another transmissive x-ray optical element can be used to focus reflected or scattered x-rays onto a detector to enhance the resolving capabilities of the system. The compact geometry of transmissive x-ray optical element allows for more flexible placement and positioning than would be feasible with conventional curved crystal reflectors. For example, multiple x-ray beams can be focused onto a test sample using a transmissive x-ray optical element array. Robust zone plates can be efficiently produced using a damascene process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.