Photochromic substrate container
US7073667B2 · kind B2 · utility
3Cited by
9References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2004 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Oct 22, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67366
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.