Mark V. Smith
37Patents
10h-index
26Co-inventors
75Inventor score
Filing activity: Jun 19, 1992 → Feb 14, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6187182A | Filter cartridge assembly for a gas purging system | Emerging Cross-Sectional Technologies | 38 | Expired |
| US5911887A | Method of etching a bond pad | Electricity | 18 | Expired |
| US7347329B2 | Substrate carrier | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6513654B2 | SMIF container including an electrostatic dissipative reticle support structure | Electricity | 14 | Expired |
| US7182203B2 | Wafer container and door with vibration dampening latching mechanism | Fixed Constructions | 14 | Expired |
| US7900776B2 | Wafer container with door actuated wafer restraint | Performing Operations; Transporting | 14 | Active |
| US9054144B2 | Porous barrier for evenly distributed purge gas in a microenvironment | Electricity | 13 | Active |
| US8783463B2 | Wafer container with tubular environmental control components | Electricity | 13 | Active |
| US7201276B2 | Front opening substrate container with bottom plate | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7422107B2 | Kinematic coupling with textured contact surfaces | Emerging Cross-Sectional Technologies | 10 | Active |
| USD673853S1 | Substrate shipper component | General | 9 | Active |
| US7100772B2 | Wafer container with door actuated wafer restraint | Performing Operations; Transporting | 9 | Expired |
| US7677393B2 | Wafer container and door with vibration dampening latching mechanism | Fixed Constructions | 9 | Active |
| US7523830B2 | Wafer container with secondary wafer restraint system | Electricity | 9 | Active |
| US5203562A | Dice construction | Human Necessities | 8 | Expired |
| US7857683B2 | CMP retaining ring | Emerging Cross-Sectional Technologies | 8 | Active |
| US7316325B2 | Substrate container | Electricity | 7 | Expired |
| US7325693B2 | Wafer container and door with cam latching mechanism | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7866480B2 | Front opening substrate container with bottom plate | Emerging Cross-Sectional Technologies | 7 | Active |
| USD664851S1 | Substrate shipper component | General | 5 | Active |
| US6344281B1 | Aluminum metallization method and product | Emerging Cross-Sectional Technologies | 5 | Expired |
| US9997388B2 | Substrate container with purge ports | Performing Operations; Transporting | 5 | Active |
| US10347517B2 | Towers for substrate carriers | Electricity | 4 | Active |
| US7344030B2 | Wafer carrier with apertured door for cleaning | Electricity | 3 | Expired |
| US7073667B2 | Photochromic substrate container | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.