Patent · US Expired

Discrete polarization state spectroscopic ellipsometer system and method of use

US7075650B1 · kind B1 · utility

11Cited by

24References

28Claims

0Family size

Assignee

J.A. WOOLLAM CO., INC. · US

Inventors

Blaine D. Johs · Lincoln, US
Martin M. Liphardt · Lincoln, US
Ping He · Lincoln, US
Jeffrey S. Hale · Lincoln, US

Key dates

Filing date	Jul 7, 2003
Grant date	Jul 11, 2006
Priority date	—
Expiry date	Sep 28, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/213
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.