Methods and apparatus for transporting substrate carriers
US7077264B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2004 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Jan 26, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.