Eric A. Englhardt
75Patents
15h-index
93Co-inventors
87Inventor score
Filing activity: Jun 20, 1994 → Sep 7, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5476548A | Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring | Electricity | 57 | Expired |
| US6955197B2 | Substrate carrier having door latching and substrate clamping mechanisms | Emerging Cross-Sectional Technologies | 50 | Expired |
| US7234584B2 | System for transporting substrate carriers | Electricity | 37 | Expired |
| US7243003B2 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Performing Operations; Transporting | 34 | Expired |
| US7651306B2 | Cartesian robot cluster tool architecture | Emerging Cross-Sectional Technologies | 28 | Active |
| US7077264B2 | Methods and apparatus for transporting substrate carriers | Emerging Cross-Sectional Technologies | 27 | Expired |
| US7230702B2 | Monitoring of smart pin transition timing | Electricity | 24 | Expired |
| US7258520B2 | Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing | Emerging Cross-Sectional Technologies | 23 | Expired |
| US7221993B2 | Systems and methods for transferring small lot size substrate carriers between processing tools | Emerging Cross-Sectional Technologies | 21 | Expired |
| US7819079B2 | Cartesian cluster tool configuration for lithography type processes | Electricity | 20 | Active |
| US8689812B2 | Methods and loadport for purging a substrate carrier | Emerging Cross-Sectional Technologies | 17 | Active |
| US7433756B2 | Calibration of high speed loader to substrate transport system | Electricity | 17 | Expired |
| US7359767B2 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Performing Operations; Transporting | 17 | Active |
| US8225496B2 | Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated | Emerging Cross-Sectional Technologies | 16 | Active |
| US6155198A | Apparatus for constructing an oxidized film on a semiconductor wafer | Electricity | 15 | Expired |
| US7299831B2 | Substrate carrier having door latching and substrate clamping mechanisms | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7156221B2 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Electricity | 14 | Expired |
| US7346431B2 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyer | Performing Operations; Transporting | 13 | Active |
| US7792608B2 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Performing Operations; Transporting | 13 | Active |
| US7798764B2 | Substrate processing sequence in a cartesian robot cluster tool | Emerging Cross-Sectional Technologies | 13 | Active |
| US7527141B2 | System for transporting substrate carriers | Electricity | 12 | Active |
| US7168553B2 | Dynamically balanced substrate carrier handler | Electricity | 12 | Expired |
| US7374393B2 | Method of retaining a substrate during a substrate transferring process | Electricity | 12 | Expired |
| US7930061B2 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Electricity | 11 | Active |
| US8019467B2 | Scheduling method for processing equipment | Electricity | 11 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.