Early detection of contact liner integrity by chemical reaction
US7078247B2 · kind B2 · utility
0Cited by
8References
19Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 6, 2003 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Apr 11, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/115831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The integrity of a liner in an interconnect structure or other layer in an integrate circuit is tested in a short time by exposing the liner to a reactive gas that attacks the underlying silicon or other material behind the liner. A weak spot in the liner permits the gas to react with the silicon, which produces a visible area that can be readily identified. The test can be performed in a few hours, in contrast to a period of several months required to complete the process, package the circuit and conduct a burn-in test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.