Patent · US Expired

Apparatus and method for proof of outgassing products

US7078709B2 · kind B2 · utility

2Cited by

2References

18Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Waltraud Herbst · Uttenreuth, DE
Karl Kragler · Erlangen, DE
Michael Sebald · Waischenfeld, DE

Key dates

Filing date	Oct 28, 2004
Grant date	Jul 18, 2006
Priority date	—
Expiry date	Oct 28, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/0392
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Outgassing products, which are formed during the exposure of photoresist systems by laser irradiation, are adsorbed on a proof plate for further analysis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.