Temperature sensing system for temperature measurement in a high radio frequency environment
US7080941B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2002 |
| Grant date | Jul 25, 2006 |
| Priority date | — |
| Expiry date | Nov 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K1/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A temperature sensing system incorporates a contact temperature sensor probe for measuring the temperature of articles. The probe is able to operate effectively even in high radio frequency environments such as those present within radio frequency excited plasma processing chambers. The temperature sensing system includes a contact temperature sensor, such as a thermocouple, surrounded by a shielding sheath of a material such as aluminum which is clad with one or more layers of a cladding material. A tip insulator is provided surrounding the sheath for providing RF insulation and thermal coupling. An RF insulating and thermal insulating mounting member is connected to the tip insulator for mounting the probe on an article to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.