Method and apparatus for providing vacuum isolation
US7083161B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2004 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | May 1, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A gate valve assembly provides vacuum isolation between a first treatment system and a second treatment system. The gate valve assembly includes an actuator rotatably coupled to at least one of the first treatment system and the second treatment system, and configured to operate an actuator assembly that has an actuator arm slidably coupled to the actuator. The actuator arm has a distal end coupled to an isolation gate through a vacuum feed-through, wherein the vacuum feed-through is configured to preserve vacuum with the first treatment system and the second treatment system. The isolation gate is configured to rotate about the gate hinge when the actuator arm is translated, and to close a transfer slot between the first treatment system and the second treatment system, or open the transfer slot between the first treatment system and the second treatment system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.