Silicon source reagent compositions, and method of making and using same for microelectronic device structure
US7084080B2 · kind B2 · utility
9Cited by
38References
26Claims
0Family size
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Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Mar 29, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/693
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of synthesizing an aminosilane source reagent composition, by reacting an aminosilane precursor compound with an amine source reagent compound in a solvent medium comprising at least one activating solvent component, to yield an aminosilane source reagent composition having less than 1000 ppm halogen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.