Enhancement of eddy current based measurement capabilities
US7084621B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2002 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Aug 24, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus for enhancement of the for measuring resistance-based features of a substrate is provided. The apparatus includes a sensor configured to detect a signal produced by a eddy current generated electromagnetic field. The magnetic field enhancing source is positioned to the alternative side of the object under measurement relative to the sensor to enable the sensitivity enhancing action. The sensitivity enhancing source increases the intensity of the eddy current generated in the object under measurement, and as a result the sensitivity of the sensor. A system enabled to determine a thickness of a layer and a method for determining a resistance-based feature characteristic are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.