Low temperature process for passivation applications

US7086918B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Mark Hsiao · Tracy, US
• Takako Takehara · Hayward, US
• Quanyuan Shang · Saratoga, US
• William Harshbarger · San Jose, US

Key dates

• Filing date: Dec 11, 2002
• Grant date: Aug 8, 2006
• Expiry date: Jun 10, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K50/844

Abstract

An organic electroluminescent device comprising an anode layer on a substrate, an organic layer on the anode layer, and a cathode layer on the organic layer. In one embodiment, the cathode layer is subjected to H2 plasma prior to deposition of a protective layer over the cathode. In another embodiment, the organic electroluminescent device is encapsulated with an inner encapsulation layer on the cathode layer, and an outer encapsulation layer on the inner encapsulation layer. The inner layer is optimized for adhesion to the cathode layer.