Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy
US7087907B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2004 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Nov 5, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70916
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Process and system for detection of contamination in an imaging system, including providing an imaging system having one or more element having a surface for reflecting or refracting first incident radiation; mounting with respect to at least one of the one or more element one or more detector capable of sensing third radiation emitted or transmitted by one or more contaminant on the surface of the one or more element when second radiation is absorbed by the one or more contaminant; applying the first incident radiation and/or the second radiation to the at least one element; and detecting with the one or more detector the third radiation emitted or transmitted by the one or more contaminant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.