Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
US7088428B2 · kind B2 · utility
1Cited by
8References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2004 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Apr 3, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/0356
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Lorentz actuators generate heat due to electrical dissipation in the field coils. As the field through the coils changes, eddy currents are induced in cooling elements leading to undesirable damping forces and heating. The present invention provides an improved design that reduces eddy currents by incorporating slits in the cooling element. Slits are preferably perpendicular to the induced electric field and parallel to each other, and reduce the magnitude of the eddy currents by forcing them to take paths of higher electrical resistance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.