Patent · US Expired

Multiple system vibration isolator

US7095482B2 · kind B2 · utility

13Cited by

9References

102Claims

0Family size

Assignee

NIKON CORPORATION · JP

Inventors

Alton H. Phillips · East Palo Alto, US
Douglas C. Watson · Campbell, US
Andrew J. Hazelton · Tokyo, JP

Key dates

Filing date	Jun 28, 2002
Grant date	Aug 22, 2006
Priority date	—
Expiry date	Dec 23, 2022

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF16F9/02
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

A vibration isolator (200) for isolating a first assembly (206) from vibration from a second assembly (208) includes a first system (202) and a second system (204) coupled to the first system (202). In one embodiment, the first system (202) supports the majority of the first assembly (206) relative to the second assembly (208) and the second system (204) adjusts for a change in the location of the center of gravity of the first assembly (206). Further, the second system (204) can be used to compensate for fluctuations in the atmospheric pressure near the vibration isolator (200).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.