Wafer container with door actuated wafer restraint

US7100772B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• John Burns · Colorado Springs, US
• Matthew A. Fuller · Colorado Springs, US
• Jeffery J. King · Cocoa, US
• Martin L. Forbes · Divide, US
• Mark V. Smith · Colorado Springs, US

Key dates

• Filing date: Nov 15, 2004
• Grant date: Sep 5, 2006
• Expiry date: Nov 15, 2024

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B65D2251/04
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.