Method for adjusting the frequency of a MEMS resonator
US7102467B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2004 |
| Grant date | Sep 5, 2006 |
| Priority date | — |
| Expiry date | Aug 11, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02527
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
There are many inventions described and illustrated herein. These inventions are directed to a method of fabricating a microelectromechanical resonator having an output frequency that may be adjusted, tuned, set, defined and/or selected whether before and/or after final packaging. In one aspect, the method of the present invention adjusts, tunes, sets, defines and/or selects the frequency of the microelectromechanical resonator by changing and/or removing material from the mechanical structure of the resonator by resistively heating (in a selective or non-selective manner) one or more elements and/or beams of the mechanical structure (for example, the moveable or expandable electrodes and/or frequency adjustment structures).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.