Electron beam device
US7105816B2 · kind B2 · utility
12Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Jan 7, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/244
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.