Beam directing system and method for use in a charged particle beam column
US7112803B2 · kind B2 · utility
5Cited by
24References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2004 |
| Grant date | Sep 26, 2006 |
| Priority date | — |
| Expiry date | Jul 27, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1526
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.