Sublimation bed employing carrier gas guidance structures
US7122085B2 · kind B2 · utility
563Cited by
15References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2003 |
| Grant date | Oct 17, 2006 |
| Priority date | — |
| Expiry date | Mar 11, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4483
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, a guidance structure is configured to facilitate the repeated saturation of the carrier gas with the solid source for a vapor reactant. Methods of saturating a carrier gas using guidance structures are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.