Patent · US Expired

System and method for check-in control in wafer testing

US7123040B2 · kind B2 · utility

1Cited by

6References

10Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Keng-Chia Yang · Baoshan, TW
Chih Chien Chen · Gaodong, CN
Let-Long Chen · Tainan, TW

Key dates

Filing date	Mar 4, 2004
Grant date	Oct 17, 2006
Priority date	—
Expiry date	Apr 21, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2601
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A testing system for check-in control in wafer testing. The testing system comprises a testing tool, an optical character recognition (OCR) device, and a controller. The testing tool performs a testing process of an article. The OCR device reads optical characters disposed on the article. The controller, connected to the testing tool and the OCR device, automatically initiates a check-in process for the article according to the read optical characters.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.