Lockdown rotor for a processing machine
US7127828B2 · kind B2 · utility
1Cited by
12References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2002 |
| Grant date | Oct 31, 2006 |
| Priority date | — |
| Expiry date | Aug 4, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.